American Vacuum Society
Publisher
Publications
publisher of
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Comparison of temperature, current density, and light intensity distributions of nano-resistor patterns for an improved solid state incandescent light emitting device simulation model.
Journal of Vacuum Science and Technology B.
40:052209-052209.
2022
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Enhanced sputter and secondary ion yields using MeV gold nanoparticle beams delivered by the Andromede facility.
Journal of Vacuum Science and Technology B.
38:044008.
2020
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Heteroepitaxial growth of beta-Ga2O3 films on SiC via molecular beam epitaxy.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
38:063406-063406.
2020
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Improved a-B10C2+xHy/Si p-n heterojunction performance after neutron irradiation
2018
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Increased drift carrier lifetime in semiconducting boron carbides deposited by plasma enhanced chemical vapor deposition from carboranes and benzene
2017
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Impact of parallelism on data volumes for a multibeam mask writer.
Journal of Vacuum Science and Technology B.
34:06kf01.
2016
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Characterization of individual free-standing nano-objects by cluster SIMS in transmission.
Journal of Vacuum Science and Technology B.
34:03h117.
2016
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Characterization of nanometric inclusions via nanoprojectile impacts.
Journal of Vacuum Science and Technology B.
34:03h104.
2016
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Mask registration and lithography platform portability for nitride fin-based field effect transistors prototyping.
Journal of Vacuum Science and Technology B.
34:06k602-06K602.
2016
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Lossless layout image compression algorithms for electron-beam direct-write lithography
2015
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An information theoretic perspective on e-beam direct-write as complementary lithography
2014
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Nonvolatile memory devices with AlOx embedded Zr-doped HfO2 high-k gate dielectric stack.
Journal of Vacuum Science and Technology B.
32:03d116-03D116.
2014
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Challenges of contact module integration for GaN-based devices in a Si-CMOS environment.
Journal of Vacuum Science and Technology B.
32:030606-030606.
2014
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Electronic transport properties of top-gated epitaxial-graphene nanoribbon field-effect transistors on SiC wafers.
Journal of Vacuum Science and Technology B.
32:012202-012202.
2014
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Optical studies of the effect of oxidation on GaN.
Journal of Vacuum Science and Technology B.
32:011213-011213.
2014
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Microwave-induced nucleation of conducting graphitic domains on silicon carbide surfaces.
Journal of Vacuum Science and Technology B.
32:011215-011215.
2014
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White light emission from ultrathin tungsten metal oxide film.
Journal of Vacuum Science and Technology B.
32:011208-011208.
2014
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Fabrication of arbitrarily shaped silicon and silicon oxide nanostructures using tip-based nanofabrication
2013
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Near-edge x-ray absorption fine structure spectroscopy study of nitrogen incorporation in chemically reduced graphene oxide.
Journal of Vacuum Science and Technology B.
31:041204-041204.
2013
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Improvement of zirconium-doped hafnium oxide high-k dielectric properties by adding molybdenum.
Journal of Vacuum Science and Technology B.
31:030605-030605.
2013
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Atomic-scale movement induced in nanoridges by scanning tunneling microscopy on epitaxial graphene grown on 4H-SiC(0001).
Journal of Vacuum Science and Technology B.
31:04d101-04D101.
2013
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Wet etching silicon nanofins with (111)-oriented sidewalls.
Journal of Vacuum Science and Technology B.
31:021801-021801.
2013
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Combined helium ion beam and nanoimprint lithography attains 4 nm half-pitch dense patterns.
Journal of Vacuum Science and Technology B.
30:06f304-06F304.
2012
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In situ near-edge x-ray absorption fine structure spectroscopy investigation of the thermal defunctionalization of graphene oxide.
Journal of Vacuum Science and Technology B.
30:061206-061206.
2012
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Template-assisted assembly of ZnO nanorods with postdeposition growth.
Journal of Vacuum Science and Technology B.
30:06ff01.
2012
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Near-edge x-ray absorption fine structure spectroscopy studies of charge redistribution at graphene/dielectric interfaces.
Journal of Vacuum Science and Technology B.
30:041205-041205.
2012
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Process effects of copper film over a step etched with a plasma-based process.
Journal of Vacuum Science and Technology B.
30:021204-021204.
2012
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Bilayer graphene by bonding CVD graphene to epitaxial graphene.
Journal of Vacuum Science and Technology B.
30:03d110-03D110.
2012
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Fabrication of top-gated epitaxial graphene nanoribbon FETs using hydrogen-silsesquioxane.
Journal of Vacuum Science and Technology B.
30:03d104-03D104.
2012
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Work function extraction of metal gates with alternate channel materials.
Journal of Vacuum Science and Technology B.
30:022202-022202.
2012
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Electrical and microstructural properties of N+ ion-implanted ZnO and ZnO:Ag thin films
2011
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Single-walled carbon nanotube alignment by grating-guided electrostatic self-assembly.
Journal of Vacuum Science and Technology B.
28:1318-1321.
2010
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Lateral-flow particle filtration and separation with multilayer microfluidic channels.
Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics.
27:3115-3119.
2009
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Solid-state dye-sensitized solar cell based on semiconducting nanomaterials.
Journal of Vacuum Science and Technology B.
27:3073-3077.
2009
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Sub-15 nm nanoimprint molds and pattern transfer
2009
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Si-containing block copolymers for self-assembled nanolithography.
Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics.
26:2489-2494.
2008
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Patterning chalcogenide glass by direct resist-free thermal nanoimprint
2008
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Optimal temperature for development of poly(methylmethacrylate).
Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics.
25:2013-2016.
2007
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Instability of junctions formed by low energy B implant and low temperature solid phase epitaxy growth
2007
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Precise positioning of single-walled carbon nanotubes by ac dielectrophoresis.
Journal of Vacuum Science and Technology B.
24:3173-3178.
2006
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Nanofabrication module integrated with optical aligner
2006
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Investigation of the magnetic susceptibility of nanocomposites obtained in zero-field-cooled conditions
2006
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Physical and electrical properties of Ta-N, Mo-N, and W-N electrodes on HfO2 high-k gate dielectric.
Journal of Vacuum Science and Technology B.
24:349-357.
2006
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Synthesis of metallic nanocrystals with size and depth control: A case study.
Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics.
23:1470-1473.
2005
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Amorphous silicon nitride films of different composition deposited at room temperature by pulsed glow discharge plasma immersion ion implantation and deposition
2004
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Thermally actuated probe array for parallel dip-pen nanolithography.
Journal of Vacuum Science and Technology B.
22:2563-2567.
2004
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Formation of silicon nanocrystals in SiO2 by oxireduction reaction induced by impurity implantation and annealing
2004
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Incorporation of fluorine in hydrogenated silicon carbide films deposited by pulsed glow discharge
2004
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Use of the focused ion beam technique to produce a sharp spherical diamond indenter for sub-10 nm nanoindentation measurements.
Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics.
22:668-672.
2004
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Fabrication and characterization of a monolithic thin-film edge emitter device with zinc-oxide-tungsten-based thin-film phosphor.
Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics.
22:165-170.
2004
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Ultrashallow junction formation by point defect engineering
2004
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Influence of carbon content and average energy of deposited ions on mechanical and optical properties of SiCN films grown by plasma ion immersion processing
2003
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The role of trapped Ar atoms in the mechanical properties of boron carbide films deposited by dc-magnetron sputtering
2003
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Cleaning of Si and properties of the HfO2Si interface.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
21:718-722.
2003
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Comparison of atomic force microscopy imaging methods and roughness determinations for a highly polished quartz surface.
Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics.
20:2183-2186.
2002
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Fluorine and boron co-doped diamond-like carbon films deposited by pulsed glow discharge plasma immersion ion processing
2002
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Plasma immersion ion cleaning of oxidized steel surfaces using hexafluoroethane and argon plasmas
2001
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Stoichiometric and Ar-ion Sputtered Uranium Dioxide (111) Single Crystal by XPS.
Surface Science Spectra.
8:297-302.
2001
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Electrochemical characterization and surface analysis of bulk amorphous alloys in aqueous solutions at different pH.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
19:1447-1453.
2001
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Structure, stability, and mechanical properties of epitaxial W/NbN superlattices.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
19:952-957.
2001
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Synthesis of fluorinated diamond-like carbon films by the plasma immersion ion processing technique
2001
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Investigation of Si-doped diamond-like carbon films synthesized by plasma immersion ion processing
2000
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The role of oxygen in the intrinsic tensile residual stress evolution in sputter-deposited thin metal films
2000
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Structure, hardness, and tribological properties of reactive magnetron sputtered chromium nitride films
2000
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Characterization and enhanced properties of plasma immersion ion processed diamond-like carbon films
1999
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Graphite macroparticle filtering efficiency of three different magnetic filter designs used in the filtered cathodic vacuum arc deposition of tetrahedral amorphous carbon films
1999
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Mechanical properties, stress evolution and high-temperature thermal stability of nanolayered MoSiN/SiC thin films
1999
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Optical properties of diamond-like carbon synthesized by plasma immersion ion processing
1999
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Processing of diamondlike carbon using plasma immersion ion deposition
1999
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Size distribution of SiGeC quantum dots grown on Si(311) and Si(001) surfaces.
Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics.
16:1142-1144.
1998
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Fabrication and characterization of gated porous silicon cathode field emission arrays.
Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics.
16:777-779.
1998
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Hard boronsuboxide-based films deposited in a sputter-sourced, high-density plasma deposition system.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
15:2623-2626.
1997
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Cyclization and related reactions of iodoethanol on Ag(110).
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
15:1667-1673.
1997
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Steady-state catalytic C-C bond formation on reduced TiO2 surfaces.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
15:1586-1591.
1997
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High-temperature structural stability of MoSi2-based nanolayer composites.
Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena : an official journal of the American Vacuum Society.
13:1126-1126.
1995
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INTERCHAIN VACANCY MIGRATION OF GAAS(110).
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
12:1855-1857.
1994
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KNIFE-EDGE THIN-FILM FIELD-EMISSION CATHODES ON (110) SILICON-WAFERS.
Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics.
12:644-647.
1994
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FABRICATION OF A NANOSCALE, INPLANE GATED QUANTUM-WIRE BY LOW-ENERGY ION EXPOSURE.
Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics.
12:8-13.
1994
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IMPROVED MONOLITHIC VACUUM FIELD-EMISSION DIODES.
Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics.
12:666-671.
1994
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APPLICATION OF LUMINESCENCE TECHNIQUES TO PROBE SURFACE-ADSORBATE INTERACTIONS ON OXIDE SINGLE-CRYSTALS.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
11:209-218.
1993
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PHASE-STABILITY VERSUS THE LATTICE MISMATCH OF (100)CO1-XGAX THIN-FILMS ON (100)GAAS
1991
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THE IMAGE POTENTIAL IN SCANNING TUNNELING MICROSCOPY OF SEMICONDUCTOR SURFACES.
Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics.
9:2399-2404.
1991
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FABRICATION OF A GATED GALLIUM-ARSENIDE HETEROSTRUCTURE RESONANT TUNNELING DIODE.
Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics.
8:393-396.
1990
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A BOLT-ON DEPOSITION SOURCE FOR ULTRAHIGH-VACUUM GROWTH OF INTERMETALLIC COMPOUND FILMS
1989
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SIMULATIONS OF METALORGANIC CHEMICAL VAPOR-DEPOSITION AND OF CLUSTER FORMATION ON GAAS.
Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics.
7:729-732.
1989
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REACTION OF AU4 AND GA(CH3)3 WITH GAAS(110).
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
7:790-791.
1989
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CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPY OF THE INTERFACES BETWEEN PHYSICAL VAPOR-DEPOSITED TINX COATINGS AND STEEL SUBSTRATES.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
7:2486-2490.
1989
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REACTION OF DIMERS AND DIATOMIC-MOLECULES WITH GAAS(110) - MOLECULAR-DYNAMICS COMPUTER-SIMULATIONS.
Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics.
6:1302-1305.
1988
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FINGERPRINTING OF POLYMER SURFACES WITH CF-252 PARTICLE DESORPTION MASS-SPECTROMETRY
1988
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GROWTH AND LUMINESCENCE SPECTROSCOPY OF A CUCL QUANTUM WELL STRUCTURE
1988
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MULTIPLE INITIAL CHEMISORPTION SITES - AL ON GAAS(110).
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
6:1491-1494.
1988
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THE ATOMIC STRUCTURES OF THE SI(111)-SQUARE-ROOT-3XSQUARE-ROOT-3-AU AND SI(111)-6X6-AU SURFACES STUDIED BY LOW-ENERGY ION-SCATTERING
1988
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INSB-CDTE INTERFACES - A COMBINED STUDY BY SOFT-X-RAY PHOTOEMISSION, LOW-ENERGY ELECTRON-DIFFRACTION, AND RAMAN-SPECTROSCOPY
1987
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Wear and friction measurements of ion beam induced FeTi surface alloys on AISI 304 stainless steel.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
4:2997-3001.
1986
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INTRINSIC INTERFACE STATES AND DEFECT STATES FOR SI/NISI2(111).
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
4:2328-2330.
1986
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QUANTITATIVE SURFACE STRUCTURAL DETERMINATION USING IMPACT COLLISION ION-SCATTERING SPECTROSCOPY
1986
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Calibration of an energy dispersive spectroscopy k factor using Rutherford backscattering
1985
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AUGA2 ON GASB(001) - AN EPITAXIAL, THERMODYNAMICALLY STABILIZED METAL III-V-COMPOUND SEMICONDUCTOR INTERFACE
1985
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DANGLING BONDS AND SCHOTTKY BARRIERS.
Journal of Vacuum Science and Technology B.
3:1162-1166.
1985
-
THEORY OF SI/NISI2 INTERFACE STATES.
Journal of Vacuum Science and Technology B.
3:1221-1223.
1985
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A technique for the production of a thin film with a linearly varying composition.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
3:1903-1906.
1985
-
ROLLING-CONTACT FATIGUE BEHAVIOR OF CU AND TIN COATINGS ON BEARING STEEL SUBSTRATES.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
3:2348-2353.
1985
-
THEORY OF SCHOTTKY-BARRIER FORMATION FOR TRANSITION-METALS ON SI,GE,DIAMOND, AND SIX GE1-X ALLOYS.
Journal of Vacuum Science and Technology B.
2:491-495.
1984
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THEORY OF SURFACE-DEFECT STATES AND SCHOTTKY-BARRIER HEIGHTS - APPLICATION TO INAS.
Journal of Vacuum Science and Technology B.
2:449-452.
1984
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CHARACTERIZATION OF THE SURFACE NET AND ELECTRONIC-STRUCTURE OF AUGA2(001)
1984
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EPITAXIAL-GROWTH OF AG FILMS ON GE(001)
1983
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Effects of an orderdisorder transition on surface deep levels in metastable (GaAs)1 x Ge2 x.
Journal of Vacuum Science and Technology B.
1:747-750.
1983
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FERMI-LEVEL PINNING AT HETEROJUNCTIONS.
Journal of Vacuum Science and Technology B.
1:401-403.
1983
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BOUND AND RESONANT SURFACE-STATES AT THE (110) SURFACES OF ALSB, ALAS, AND ALP.
Journal of Vacuum Science and Technology.
21:548-550.
1982
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CHANNELING MEASUREMENTS OF LATTICE DISORDER AT THE GAAS-INAS(100) HETEROJUNCTION
1982
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SURFACE-STRUCTURE DETERMINATION USING ION-SCATTERING SPECTROSCOPY
1982
-
Surface defects and Fermilevel pinning in InP.
Journal of Vacuum Science and Technology.
20:659-661.
1982
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Effects of the environment on point-defect energy levels in semiconductors.
Journal of Vacuum Science and Technology.
19:502-507.
1981
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Unified theory of pointdefect electronic states, core excitons, and intrinsic electronic states at semiconductor surfaces.
Journal of Vacuum Science and Technology.
19:383-387.
1981
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THEORY OF DEEP SUBSTITUTIONAL SP3-BONDED IMPURITY LEVELS AND CORE EXCITONS AT SEMICONDUCTOR INTERFACES.
Journal of Vacuum Science and Technology.
17:993-996.
1980
-
Ultrahigh vacuum system for ISABELLE full cell.
Journal of Vacuum Science and Technology.
17:342-344.
1980
-
SIMS of transfer ribonucleic acid molecules encapsulated between free-standing graphene sheets..
Biointerphases: an open access journal for the biomaterials interface community.
02A324-02A324.
2016
-
Preparation of ternary alloy libraries for high-throughput screening of material properties by means of thick film deposition and interdiffusion: Benefits and limitations.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
1788-1792.
2004
-
Nonlithographic approach to nanostructure fabrication using a scanned electrospinning source.
Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics.
2994-2997.
2003
-
Cluster-ion implantation: An approach to fabricate ultrashallow junctions in silicon.
Journal of Vacuum Science and Technology B.
992-994.
2002
-
Defect engineering: An approach on ultrashallow junction in silicon.
Journal of Vacuum Science and Technology B.
419-421.
2002
-
Plasma oxidation as a tool to design oxide films at low temperatures.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
1965-1970.
2001
-
Synthesis of diamondlike carbon films with superlow friction and wear properties.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
1987-1992.
2000
-
Investigation of framework and cation substitutions in Keggin-type heteropoly acids probed by scanning tunneling microscopy and tunneling spectroscopy.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
1299-1304.
1997
-
Ethylene oxide interaction with Pd surfaces: Experimental and theoretical results.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
1469-1474.
1996
-
Role of interface microstructure in rectifying metal/semiconductor contacts: Ballistic electron emission observations correlated to microstructure.
Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics.
1238-1242.
1996
-
Porous silicon field emission cathode development.
Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics.
1899-1901.
1996
-
CARRIER CAPTURE AS A MECHANISM FOR DEFECT MIGRATION AT SEMICONDUCTOR SURFACES.
Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics.
1144-1149.
1995
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BLUE-LIGHT EMISSION OBSERVED IN A MONOLITHIC THIN-FILM EDGE EMISSION VACUUM MICROELECTRONIC DEVICE.
Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena : an official journal of the American Vacuum Society.
500-504.
1995
-
LATERAL VARIATION IN THE SCHOTTKY-BARRIER HEIGHT OF AU/PTSI/(100)SI DIODES.
Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics.
2634-2638.
1994
-
LASER-INDUCED DESORPTION OF SMALL ALCOHOLS FROM AG(111) BY RESONANT VIBRATIONAL-EXCITATION.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
2084-2089.
1993
-
SITE REQUIREMENTS OF REACTIONS ON OXIDE SURFACES.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
2162-2168.
1993
-
MANUFACTURABLE VACUUM FIELD-EMISSION DIODES.
Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics.
505-510.
1993
-
NONLINEAR-REGRESSION TECHNIQUE FOR PARAMETER EXTRACTION FROM FIELD-EMISSION DATA.
Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics.
379-382.
1993
-
ENERGY SURFACE AND DYNAMICS OF SI(100).
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
2052-2054.
1992
-
OBSERVED ION MIXING OF AU WITH GAAS(001) DURING LOW-ENERGY ION-SCATTERING.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
2606-2608.
1992
-
POLARIZATION OF ELECTRONIC CHARGE AND DISTORTION OF SURFACE GEOMETRY BY A SCANNING TUNNELING MICROSCOPY TIP - SI(100).
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
974-977.
1992
-
DIFFUSION OF SI ATOMS AND DIMERS ON SI(100).
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
876-879.
1991
-
DIMERIZATION AND ADSORPTION OF SI ON THE SI(100) SURFACE.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
656-658.
1991
-
PLASMA DESORPTION MASS-SPECTROMETRY WITH COINCIDENCE COUNTING FOR THE ANALYSIS OF POLYMER SURFACES.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
1300-1306.
1991
-
SURFACE REACTIVITY OF TITANIUM ALUMINUM-ALLOYS - TI3AL, TIAL, AND TIAL3.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
1610-1615.
1991
-
KINETICS AND DYNAMICS ON SI(100).
Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics.
685-689.
1991
-
ORDERED ARRAYS OF PROTEINS ON GRAPHITE OBSERVED BY SCANNING TUNNELING MICROSCOPY.
Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics.
1219-1222.
1991
-
SUBSURFACE CHEMISORPTION OF SMALL ATOMS ON SEMICONDUCTORS - B, C, AND N ON GAAS.
Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics.
761-763.
1991
-
EFFECT OF POSTDEPOSITION ANNEALING ON STRUCTURE AND CHEMISTRY OF THE TIN FILM STEEL SUBSTRATE INTERFACES.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
439-443.
1991
-
ELECTRONIC STATES OF SB, BI, AU, AND SN CLUSTERS ON GAAS(110).
Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics.
900-902.
1990
-
A NEW EXPERIMENTAL-METHOD FOR DETERMINING SECONDARY ION YIELDS FROM SURFACES BOMBARDED BY COMPLEX HETEROGENEOUS IONS.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
2265-2268.
1990
-
REACTIVE ION ETCHING OF PLASMA ENHANCED CHEMICAL VAPOR-DEPOSITION AMORPHOUS-SILICON AND SILICON-NITRIDE - FEEDING GAS EFFECTS.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
1702-1705.
1990
-
SLOPE CONTROL OF MOLYBDENUM LINES ETCHED WITH REACTIVE ION ETCHING.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
1529-1532.
1990
-
IMPACT COLLISION ION-SCATTERING SPECTROSCOPY OF AG(110) USING LI-7+ AND HE-4+.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
808-809.
1988
-
TERNARY SOLID-PHASE EQUILIBRIA IN THE SYSTEMS (AG,IN,AU)-(CD,HG)-TE.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
1564-1564.
1988
-
ANALYSIS OF CHEMICAL BONDING IN TIC, TIN, AND TIO USING 2ND-PRINCIPLES BAND STRUCTURES FROM PHOTOEMISSION DATA.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
1603-1603.
1986
-
ELECTRONIC-STRUCTURE INVESTIGATION OF EPITAXIAL NICKEL SILICIDES ON SI(001).
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films.
269-270.
1984