SIMULATIONS OF METALORGANIC CHEMICAL VAPOR-DEPOSITION AND OF CLUSTER FORMATION ON GAAS Academic Article

authors

• Allen, Roland

published proceedings

• JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

author list (cited authors)

• MENON, M., & ALLEN, R. E.

citation count

• 4

complete list of authors

• MENON, M||ALLEN, RE

publication date

• July 1989

publisher

• American Vacuum Society  Publisher

published in

• Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics  Journal

Digital Object Identifier (DOI)

• 10.1116/1.584634

start page

• 729

end page

• 732

volume

• 7

issue

• 4