Challenges of contact module integration for GaN-based devices in a Si-CMOS environment
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
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Johnson, D. W., Ravikirthi, P., Suh, J. W., Lee, R., Hill, R., Wong, M. H., Piner, E. L., & Harris, H. R.
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Johnson, Derek W||Ravikirthi, Pradhyumna||Suh, Jae Woo||Lee, Rinus TP||Hill, Richard JW||Wong, Man Hoi||Piner, Edwin L||Harris, Harlan Rusty
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http://dx.doi.org/10.1116/1.4874801