Use of the focused ion beam technique to produce a sharp spherical diamond indenter for sub-10 nm nanoindentation measurements Academic Article uri icon


  • The application of focused ion beam milling method to produce high aspect ratio, sharp spherical diamond indenters for nanoindentation measurements was discussed. The method was used to obtain a spherical well-defined super tip at the apex of the indenter, with a radius of 53.4 nm. The indenter was used used in sub-10 nm nanoindentation measurements on fused quartz and silicon. It was observed that the tip showed long-term resistance against plastic deformation and wear. The transition from elastic to plastic contact occurred at shallow contact depths was due to the small size of indenter tip.

published proceedings


author list (cited authors)

  • Yu, N., & Polycarpou, A. A.

citation count

  • 13

complete list of authors

  • Yu, N||Polycarpou, AA

publication date

  • March 2004