Use of the focused ion beam technique to produce a sharp spherical diamond indenter for sub-10 nm nanoindentation measurements Academic Article

abstract

• The application of focused ion beam milling method to produce high aspect ratio, sharp spherical diamond indenters for nanoindentation measurements was discussed. The method was used to obtain a spherical well-defined super tip at the apex of the indenter, with a radius of 53.4 nm. The indenter was used used in sub-10 nm nanoindentation measurements on fused quartz and silicon. It was observed that the tip showed long-term resistance against plastic deformation and wear. The transition from elastic to plastic contact occurred at shallow contact depths was due to the small size of indenter tip.

authors

• Polycarpou, Andreas

published proceedings

• JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

author list (cited authors)

• Yu, N., & Polycarpou, A. A.

citation count

• 13

complete list of authors

• Yu, N||Polycarpou, AA

publication date

• March 2004

publisher

• American Vacuum Society  Publisher

published in

• Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics  Journal

keywords

• 40 Engineering
• 4018 Nanotechnology

Digital Object Identifier (DOI)

• 10.1116/1.1676467

start page

• 668

end page

• 672

volume

• 22

issue

• 2

URL

• http://dx.doi.org/10.1116/1.1676467