Subsurface chemisorption of small atoms on semiconductors: B, C, and N on GaAs Conference Paper uri icon

published proceedings

  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

author list (cited authors)

  • Menon, M.

citation count

  • 0

complete list of authors

  • Menon, Madhu

publication date

  • March 1991