Impact collision ion scattering spectroscopy (ICISS), employing 5 keV 6Li+ projectiles, was used to study the surface structure of Cu(110) and Cu(110) (21)-O. A new method of ICISS data analysis is presented which utilizes a one-atom Monte Carlo computer simulation to map out the flux of ions behind each atom visible to the incoming ion beam. The results of these calculations for various structural parameters were compared with the experimental data until a best fit was achieved. The results for the clean surface support a model with a 105% contraction of the first atomic layer spacing and a surface vibrational amplitude enhancement of 1.50.5 times the bulk value. For the (21) oxygen-induced reconstruction, a model in which every other [001] row in the surface plane is vacant, the first-to-second layer spacing is expanded 2510% and the second-to-third layer spacing is contracted 105%, was consistent with the experimental results.
