Plasma immersion ion cleaning of oxidized steel surfaces using hexafluoroethane and argon plasmas Academic Article uri icon

published proceedings

  • Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

author list (cited authors)

  • Peters, A. M., & Nastasi, M.

citation count

  • 4

complete list of authors

  • Peters, AM||Nastasi, M

publication date

  • January 2001