Plasma immersion ion cleaning of oxidized steel surfaces using hexafluoroethane and argon plasmas Academic Article

authors

• Nastasi, Michael

published proceedings

• Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

author list (cited authors)

• Peters, A. M., & Nastasi, M.

citation count

• 4

complete list of authors

• Peters, AM||Nastasi, M

publication date

• January 2001

publisher

• American Vacuum Society  Publisher

published in

• Journal of Vacuum Science and Technology Part A: International Journal Devoted to Vacuum, Surfaces, and Films  Journal

Digital Object Identifier (DOI)

• 10.1116/1.1403720

start page

• 2773

end page

• 2778

volume

• 19

issue

• 6