Incorporation of fluorine in hydrogenated silicon carbide films deposited by pulsed glow discharge Academic Article uri icon

published proceedings

  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

author list (cited authors)

  • Jacobsohn, L. G., Afanasyev-Charkin, I. V., Cooke, D. W., Schulze, R. K., Averitt, R. D., & Nastasi, M.

citation count

  • 5

complete list of authors

  • Jacobsohn, LG||Afanasyev-Charkin, IV||Cooke, DW||Schulze, RK||Averitt, RD||Nastasi, M

publication date

  • July 2004