Incorporation of fluorine in hydrogenated silicon carbide films deposited by pulsed glow discharge Academic Article

published proceedings

• Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

author list (cited authors)

• Jacobsohn, L. G., Afanasyev-Charkin, I. V., Cooke, D. W., Schulze, R. K., Averitt, R. D., & Nastasi, M.

citation count

• 5

complete list of authors

• Jacobsohn, LG||Afanasyev-Charkin, IV||Cooke, DW||Schulze, RK||Averitt, RD||Nastasi, M

publication date

• July 2004

publisher

• American Vacuum Society  Publisher

published in

• Journal of Vacuum Science and Technology Part A: International Journal Devoted to Vacuum, Surfaces, and Films  Journal

Digital Object Identifier (DOI)

• 10.1116/1.1764820

start page

• 1223

end page

• 1228

volume

• 22

issue

• 4

URL

• http://dx.doi.org/10.1116/1.1764820