Investigation of Si-doped diamond-like carbon films synthesized by plasma immersion ion processing Academic Article

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authors

Nastasi, Michael

published proceedings

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

altmetric score

3

author list (cited authors)

He, X. M., Walter, K. C., Nastasi, M., Lee, S., & Fung, M. K.

citation count

41

complete list of authors

He, XM||Walter, KC||Nastasi, M||Lee, S-T||Fung, MK

publication date

January 2000

publisher

American Vacuum Society Publisher

published in

Journal of Vacuum Science and Technology Part A: International Journal Devoted to Vacuum, Surfaces, and Films Journal