Investigation of Si-doped diamond-like carbon films synthesized by plasma immersion ion processing Academic Article

authors

• Nastasi, Michael

published proceedings

• Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

altmetric score

• 3

author list (cited authors)

• He, X. M., Walter, K. C., Nastasi, M., Lee, S., & Fung, M. K.

citation count

• 41

complete list of authors

• He, XM||Walter, KC||Nastasi, M||Lee, S-T||Fung, MK

publication date

• January 2000

publisher

• American Vacuum Society  Publisher

published in

• Journal of Vacuum Science and Technology Part A: International Journal Devoted to Vacuum, Surfaces, and Films  Journal

Digital Object Identifier (DOI)

• 10.1116/1.1286141

start page

• 2143

end page

• 2148

volume

• 18

issue

• 5

URL

• http://dx.doi.org/10.1116/1.1286141