Investigation of Si-doped diamond-like carbon films synthesized by plasma immersion ion processing
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Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
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He, X. M., Walter, K. C., Nastasi, M., Lee, S., & Fung, M. K.
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He, XM||Walter, KC||Nastasi, M||Lee, S-T||Fung, MK
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http://dx.doi.org/10.1116/1.1286141