Investigation of Si-doped diamond-like carbon films synthesized by plasma immersion ion processing Academic Article uri icon

published proceedings

  • Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

altmetric score

  • 3

author list (cited authors)

  • He, X. M., Walter, K. C., Nastasi, M., Lee, S., & Fung, M. K.

citation count

  • 41

complete list of authors

  • He, XM||Walter, KC||Nastasi, M||Lee, S-T||Fung, MK

publication date

  • January 2000