Amorphous silicon nitride films of different composition deposited at room temperature by pulsed glow discharge plasma immersion ion implantation and deposition
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Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
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Afanasyev-Charkin, I. V., Jacobsohn, L. G., Averitt, R. D., & Nastasi, M.
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Afanasyev-Charkin, IV||Jacobsohn, LG||Averitt, RD||Nastasi, M
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http://dx.doi.org/10.1116/1.1798731