Amorphous silicon nitride films of different composition deposited at room temperature by pulsed glow discharge plasma immersion ion implantation and deposition Academic Article

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authors

Nastasi, Michael

published proceedings

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

author list (cited authors)

Afanasyev-Charkin, I. V., Jacobsohn, L. G., Averitt, R. D., & Nastasi, M.

citation count

19

complete list of authors

Afanasyev-Charkin, IV||Jacobsohn, LG||Averitt, RD||Nastasi, M

publication date

November 2004

publisher

American Vacuum Society Publisher

published in

Journal of Vacuum Science and Technology Part A: International Journal Devoted to Vacuum, Surfaces, and Films Journal