Amorphous silicon nitride films of different composition deposited at room temperature by pulsed glow discharge plasma immersion ion implantation and deposition Academic Article uri icon

published proceedings

  • Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

author list (cited authors)

  • Afanasyev-Charkin, I. V., Jacobsohn, L. G., Averitt, R. D., & Nastasi, M.

citation count

  • 19

complete list of authors

  • Afanasyev-Charkin, IV||Jacobsohn, LG||Averitt, RD||Nastasi, M

publication date

  • November 2004