Blue light emission observed in a monolithic thin film edge emission vacuum microelectronic device Conference Paper uri icon


  • A monolithic field emission vacuum microelectronic device has been fabricated which integrates a thin (approx.200 angstrom) metal film edge emitter with a unique thin film phosphor on an electrically inactive (oxidized silicon wafer) substrate. The resulting device has been tested and has been observed to produce blue light (approx.488 nm) emission from the thin film phosphor. An asymmetric behavior was observed in which light emission was produced only under the forward bias conditions. The phosphor layer is a multi-layered ZnO based phosphor with a total thickness of 4000-6000 angstrom having a surface roughness typically measured at 0.1 m. Further, the phosphor has a sheet resistivity of approximately one half ohms per square making it suitable as an anode material for light emitting devices.

published proceedings

  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

altmetric score

  • 3

author list (cited authors)

  • Williams, R. T.

citation count

  • 2

complete list of authors

  • Williams, Roger T

publication date

  • March 1995