The role of oxygen in the intrinsic tensile residual stress evolution in sputter-deposited thin metal films Academic Article uri icon

published proceedings

  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

author list (cited authors)

  • Misra, A., & Nastasi, M.

citation count

  • 7

complete list of authors

  • Misra, A||Nastasi, M

publication date

  • January 2000