The role of trapped Ar atoms in the mechanical properties of boron carbide films deposited by dc-magnetron sputtering Academic Article

authors

• Nastasi, Michael

published proceedings

• Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

altmetric score

• 3

author list (cited authors)

• Jacobsohn, L. G., Averitt, R. D., & Nastasi, M.

citation count

• 16

complete list of authors

• Jacobsohn, LG||Averitt, RD||Nastasi, M

publication date

• September 2003

publisher

• American Vacuum Society  Publisher

published in

• Journal of Vacuum Science and Technology Part A: International Journal Devoted to Vacuum, Surfaces, and Films  Journal

Digital Object Identifier (DOI)

• 10.1116/1.1593054

start page

• 1639

end page

• 1643

volume

• 21

issue

• 5