The role of trapped Ar atoms in the mechanical properties of boron carbide films deposited by dc-magnetron sputtering Academic Article

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authors

Nastasi, Michael

published proceedings

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

altmetric score

3

author list (cited authors)

Jacobsohn, L. G., Averitt, R. D., & Nastasi, M.

citation count

16

complete list of authors

Jacobsohn, LG||Averitt, RD||Nastasi, M

publication date

September 2003

publisher

American Vacuum Society Publisher

published in

Journal of Vacuum Science and Technology Part A: International Journal Devoted to Vacuum, Surfaces, and Films Journal