The role of trapped Ar atoms in the mechanical properties of boron carbide films deposited by dc-magnetron sputtering Academic Article uri icon

published proceedings

  • Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

altmetric score

  • 3

author list (cited authors)

  • Jacobsohn, L. G., Averitt, R. D., & Nastasi, M.

citation count

  • 16

complete list of authors

  • Jacobsohn, LG||Averitt, RD||Nastasi, M

publication date

  • September 2003