Characterization and enhanced properties of plasma immersion ion processed diamond-like carbon films Academic Article uri icon

published proceedings

  • Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

author list (cited authors)

  • He, X. M., Bardeau, J., Walter, K. C., & Nastasi, M.

citation count

  • 25

complete list of authors

  • He, XM||Bardeau, J-F||Walter, KC||Nastasi, M

publication date

  • September 1999