Characterization and enhanced properties of plasma immersion ion processed diamond-like carbon films Academic Article

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authors

Nastasi, Michael

published proceedings

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

author list (cited authors)

He, X. M., Bardeau, J., Walter, K. C., & Nastasi, M.

citation count

25

complete list of authors

He, XM||Bardeau, J-F||Walter, KC||Nastasi, M

publication date

September 1999

publisher

American Vacuum Society Publisher

published in

Journal of Vacuum Science and Technology Part A: International Journal Devoted to Vacuum, Surfaces, and Films Journal