Nanofabrication module integrated with optical aligner Academic Article

authors

• Williams, R. Stanley

author list (cited authors)

• Stuart, C., Xu, Q., Tseng, R. J., Yang, Y., Hahn, H. T., Chen, Y., Wu, W., & Williams, R. S.

citation count

• 6

publication date

• January 2006

publisher

• American Vacuum Society  Publisher

published in

• Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena  Journal

Digital Object Identifier (DOI)

• 10.1116/1.2166861

start page

• 539

end page

• 542

volume

• 24

issue

• 2