Nanofabrication module integrated with optical aligner
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
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Stuart, C., Xu, Q. F., Tseng, R. J., Yang, Y., Hahn, H. T., Chen, Y., Wu, W., & Williams, R. S.
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Stuart, C||Xu, QF||Tseng, RJ||Yang, Y||Hahn, HT||Chen, Y||Wu, W||Williams, RS
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http://dx.doi.org/10.1116/1.2166861