Nanofabrication module integrated with optical aligner Academic Article uri icon

published proceedings

  • JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

author list (cited authors)

  • Stuart, C., Xu, Q. F., Tseng, R. J., Yang, Y., Hahn, H. T., Chen, Y., Wu, W., & Williams, R. S.

citation count

  • 6

complete list of authors

  • Stuart, C||Xu, QF||Tseng, RJ||Yang, Y||Hahn, HT||Chen, Y||Wu, W||Williams, RS

publication date

  • January 2006