Nanofabrication module integrated with optical aligner Academic Article uri icon

published proceedings

  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

author list (cited authors)

  • Stuart, C., Xu, Q., Tseng, R. J., Yang, Y., Hahn, H. T., Chen, Y., Wu, W., & Williams, R. S.

citation count

  • 6

complete list of authors

  • Stuart, Colin||Xu, Qianfei||Tseng, Ricky J||Yang, Yang||Hahn, H Thomas||Chen, Yong||Wu, Wei||Williams, R Stanley

publication date

  • January 2006