Synthesis of metallic nanocrystals with size and depth control: A case study Academic Article

abstract

• The goal of this work is to investigate the use of thermal annealing of thin metallic layers buried in a capping ceramic material to obtain controlled synthesis of metallic nanocrystals, i.e., to achieve nanocrystal formation with size control and narrow size distribution. SiO2PtSiO2 films were deposited by electron beam evaporation with different Pt layer thickness, 5, 10, and 25 . After deposition, films were annealed in vacuum at 500, 700 and 900C for times from 10 to 180 min. High-resolution transmission electron microscopy revealed the presence of Pt nanocrystals, their average size, and size distribution. By tuning the Pt layer thickness and the annealing conditions, it was possible to control the final nanocrystal size with narrow size distribution typically of 1nm.

authors

• Nastasi, Michael

published proceedings

• JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

author list (cited authors)

• Jacobsohn, L. G., Zhang, X., Misra, A., & Nastasi, M.

citation count

• 1

complete list of authors

• Jacobsohn, LG||Zhang, X||Misra, A||Nastasi, M

publication date

• July 2005

publisher

• American Vacuum Society  Publisher

published in

• Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics  Journal

keywords

• 40 Engineering
• 4018 Nanotechnology

Digital Object Identifier (DOI)

• 10.1116/1.1941248

start page

• 1470

end page

• 1473

volume

• 23

issue

• 4

URL

• http://dx.doi.org/10.1116/1.1941248