A technique for the production of a thin film with a linearly varying composition Academic Article

authors

• Nastasi, Michael

published proceedings

• Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

author list (cited authors)

• Nastasi, M., Barbour, J. C., Gyulai, J., Hung, L. S., & Mayer, J. W.

complete list of authors

• Nastasi, M||Barbour, JC||Gyulai, J||Hung, LS||Mayer, JW

publication date

• January 1985

publisher

• American Vacuum Society  Publisher

published in

• Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films  Journal

start page

• 1903

end page

• 1906

volume

• 3

issue

• 5