Influence of carbon content and average energy of deposited ions on mechanical and optical properties of SiCN films grown by plasma ion immersion processing Academic Article uri icon

published proceedings

  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

author list (cited authors)

  • Afanasyev-Charkin, I. V., & Nastasi, M.

citation count

  • 3

complete list of authors

  • Afanasyev-Charkin, Ivan V||Nastasi, Michael

publication date

  • November 2003