Influence of carbon content and average energy of deposited ions on mechanical and optical properties of SiCN films grown by plasma ion immersion processing Academic Article

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published proceedings

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

author list (cited authors)

Afanasyev-Charkin, I. V., & Nastasi, M.

citation count

3

complete list of authors

Afanasyev-Charkin, Ivan V||Nastasi, Michael

publication date

November 2003

publisher

American Vacuum Society Publisher

published in

Journal of Vacuum Science and Technology Part A: International Journal Devoted to Vacuum, Surfaces, and Films Journal