Preparation of ternary alloy libraries for high-throughput screening of material properties by means of thick film deposition and interdiffusion: Benefits and limitations
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The preparation of of Ni-Fe-Cr alloy libraries by depositing layers of Cr, Fe, and Ni on alumina substrates was discussed. The layers were interdiffused and alloyed by annealing in vacuum. The samples were examined with X-ray fluorescence, SEM, AES, and XRD. The result shows that the chromium oxide formed at the interface between the deposited metals and the substrate can be used as a ternary alloy library for property characterization.
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
author list (cited authors)
Rar, A., Specht, E. D., George, E. P., Santella, M. L., & Pharr, G. M.
complete list of authors
Rar, A||Specht, ED||George, EP||Santella, ML||Pharr, GM