Preparation of ternary alloy libraries for high-throughput screening of material properties by means of thick film deposition and interdiffusion: Benefits and limitations Conference Paper uri icon


  • The preparation of of Ni-Fe-Cr alloy libraries by depositing layers of Cr, Fe, and Ni on alumina substrates was discussed. The layers were interdiffused and alloyed by annealing in vacuum. The samples were examined with X-ray fluorescence, SEM, AES, and XRD. The result shows that the chromium oxide formed at the interface between the deposited metals and the substrate can be used as a ternary alloy library for property characterization.

published proceedings

  • Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

author list (cited authors)

  • Rar, A., Specht, E. D., George, E. P., Santella, M. L., & Pharr, G. M.

citation count

  • 7

complete list of authors

  • Rar, A||Specht, ED||George, EP||Santella, ML||Pharr, GM

publication date

  • July 2004