Journal of Vacuum Science and Technology Part A: International Journal Devoted to Vacuum, Surfaces, and Films
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Overview
publication venue for
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Heteroepitaxial growth of beta-Ga2O3 films on SiC via molecular beam epitaxy.
38:063406-063406.
2020
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Increased drift carrier lifetime in semiconducting boron carbides deposited by plasma enhanced chemical vapor deposition from carboranes and benzene.
35:03e101-03E101.
2017
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Electrical and microstructural properties of N+ ion-implanted ZnO and ZnO:Ag thin films.
29:03a108-03A108.
2011
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Amorphous silicon nitride films of different composition deposited at room temperature by pulsed glow discharge plasma immersion ion implantation and deposition.
22:2342-2346.
2004
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Incorporation of fluorine in hydrogenated silicon carbide films deposited by pulsed glow discharge.
22:1223-1228.
2004
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Influence of carbon content and average energy of deposited ions on mechanical and optical properties of SiCN films grown by plasma ion immersion processing.
21:1909-1914.
2003
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The role of trapped Ar atoms in the mechanical properties of boron carbide films deposited by dc-magnetron sputtering.
21:1639-1643.
2003
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Cleaning of Si and properties of the HfO2Si interface.
21:718-722.
2003
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Fluorine and boron co-doped diamond-like carbon films deposited by pulsed glow discharge plasma immersion ion processing.
20:638-642.
2002
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Electrochemical characterization and surface analysis of bulk amorphous alloys in aqueous solutions at different pH.
19:1447-1453.
2001
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Structure, stability, and mechanical properties of epitaxial W/NbN superlattices.
19:952-957.
2001
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Synthesis of fluorinated diamond-like carbon films by the plasma immersion ion processing technique.
19:782-784.
2001
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Plasma immersion ion cleaning of oxidized steel surfaces using hexafluoroethane and argon plasmas.
19:2773-2778.
2001
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Investigation of Si-doped diamond-like carbon films synthesized by plasma immersion ion processing.
18:2143-2148.
2000
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Structure, hardness, and tribological properties of reactive magnetron sputtered chromium nitride films.
18:30-36.
2000
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The role of oxygen in the intrinsic tensile residual stress evolution in sputter-deposited thin metal films.
18:2517-2521.
2000
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Characterization and enhanced properties of plasma immersion ion processed diamond-like carbon films.
17:2525-2530.
1999
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Graphite macroparticle filtering efficiency of three different magnetic filter designs used in the filtered cathodic vacuum arc deposition of tetrahedral amorphous carbon films.
17:3077-3080.
1999
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Hard boronsuboxide-based films deposited in a sputter-sourced, high-density plasma deposition system.
15:2623-2626.
1997
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Cyclization and related reactions of iodoethanol on Ag(110).
15:1667-1673.
1997
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Steady-state catalytic C-C bond formation on reduced TiO2 surfaces.
15:1586-1591.
1997
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INTERCHAIN VACANCY MIGRATION OF GAAS(110).
12:1855-1857.
1994
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APPLICATION OF LUMINESCENCE TECHNIQUES TO PROBE SURFACE-ADSORBATE INTERACTIONS ON OXIDE SINGLE-CRYSTALS.
11:209-218.
1993
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A BOLT-ON DEPOSITION SOURCE FOR ULTRAHIGH-VACUUM GROWTH OF INTERMETALLIC COMPOUND FILMS.
7:2813-2814.
1989
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REACTION OF AU4 AND GA(CH3)3 WITH GAAS(110).
7:790-791.
1989
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CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPY OF THE INTERFACES BETWEEN PHYSICAL VAPOR-DEPOSITED TINX COATINGS AND STEEL SUBSTRATES.
7:2486-2490.
1989
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FINGERPRINTING OF POLYMER SURFACES WITH CF-252 PARTICLE DESORPTION MASS-SPECTROMETRY.
6:946-949.
1988
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GROWTH AND LUMINESCENCE SPECTROSCOPY OF A CUCL QUANTUM WELL STRUCTURE.
6:1950-1952.
1988
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MULTIPLE INITIAL CHEMISORPTION SITES - AL ON GAAS(110).
6:1491-1494.
1988
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THE ATOMIC STRUCTURES OF THE SI(111)-SQUARE-ROOT-3XSQUARE-ROOT-3-AU AND SI(111)-6X6-AU SURFACES STUDIED BY LOW-ENERGY ION-SCATTERING.
6:689-691.
1988
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Wear and friction measurements of ion beam induced FeTi surface alloys on AISI 304 stainless steel.
4:2997-3001.
1986
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INTRINSIC INTERFACE STATES AND DEFECT STATES FOR SI/NISI2(111).
4:2328-2330.
1986
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QUANTITATIVE SURFACE STRUCTURAL DETERMINATION USING IMPACT COLLISION ION-SCATTERING SPECTROSCOPY.
4:1274-1277.
1986
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Calibration of an energy dispersive spectroscopy k factor using Rutherford backscattering.
3:1895-1902.
1985
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A technique for the production of a thin film with a linearly varying composition.
3:1903-1906.
1985
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ROLLING-CONTACT FATIGUE BEHAVIOR OF CU AND TIN COATINGS ON BEARING STEEL SUBSTRATES.
3:2348-2353.
1985
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CHARACTERIZATION OF THE SURFACE NET AND ELECTRONIC-STRUCTURE OF AUGA2(001).
2:534-537.
1984
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Preparation of ternary alloy libraries for high-throughput screening of material properties by means of thick film deposition and interdiffusion: Benefits and limitations
2004
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Plasma oxidation as a tool to design oxide films at low temperatures
2001
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Synthesis of diamondlike carbon films with superlow friction and wear properties
2000
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Investigation of framework and cation substitutions in Keggin-type heteropoly acids probed by scanning tunneling microscopy and tunneling spectroscopy
1997
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Ethylene oxide interaction with Pd surfaces: Experimental and theoretical results
1996
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LASER-INDUCED DESORPTION OF SMALL ALCOHOLS FROM AG(111) BY RESONANT VIBRATIONAL-EXCITATION
1993
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SITE REQUIREMENTS OF REACTIONS ON OXIDE SURFACES
1993
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ENERGY SURFACE AND DYNAMICS OF SI(100)
1992
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OBSERVED ION MIXING OF AU WITH GAAS(001) DURING LOW-ENERGY ION-SCATTERING
1992
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POLARIZATION OF ELECTRONIC CHARGE AND DISTORTION OF SURFACE GEOMETRY BY A SCANNING TUNNELING MICROSCOPY TIP - SI(100)
1992
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DIFFUSION OF SI ATOMS AND DIMERS ON SI(100)
1991
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DIMERIZATION AND ADSORPTION OF SI ON THE SI(100) SURFACE
1991
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PLASMA DESORPTION MASS-SPECTROMETRY WITH COINCIDENCE COUNTING FOR THE ANALYSIS OF POLYMER SURFACES
1991
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SURFACE REACTIVITY OF TITANIUM ALUMINUM-ALLOYS - TI3AL, TIAL, AND TIAL3
1991
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EFFECT OF POSTDEPOSITION ANNEALING ON STRUCTURE AND CHEMISTRY OF THE TIN FILM STEEL SUBSTRATE INTERFACES
1991
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A NEW EXPERIMENTAL-METHOD FOR DETERMINING SECONDARY ION YIELDS FROM SURFACES BOMBARDED BY COMPLEX HETEROGENEOUS IONS
1990
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REACTIVE ION ETCHING OF PLASMA ENHANCED CHEMICAL VAPOR-DEPOSITION AMORPHOUS-SILICON AND SILICON-NITRIDE - FEEDING GAS EFFECTS
1990
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SLOPE CONTROL OF MOLYBDENUM LINES ETCHED WITH REACTIVE ION ETCHING
1990
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IMPACT COLLISION ION-SCATTERING SPECTROSCOPY OF AG(110) USING LI-7+ AND HE-4+
1988
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TERNARY SOLID-PHASE EQUILIBRIA IN THE SYSTEMS (AG,IN,AU)-(CD,HG)-TE
1988
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ANALYSIS OF CHEMICAL BONDING IN TIC, TIN, AND TIO USING 2ND-PRINCIPLES BAND STRUCTURES FROM PHOTOEMISSION DATA
1986
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ELECTRONIC-STRUCTURE INVESTIGATION OF EPITAXIAL NICKEL SILICIDES ON SI(001)
1984
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