OBSERVED ION MIXING OF AU WITH GAAS(001) DURING LOW-ENERGY ION-SCATTERING Conference Paper uri icon

abstract

  • Thin Au films on GaAs(100) are extremely sensitive to bombardment by low energy (5 keV) He ions that are often used as the analysis projectiles in ion scattering spectroscopy. Fluences as low as 1015 ions cm2 cause enhanced diffusion of the Au into the GaAs substrate.

published proceedings

  • JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS

author list (cited authors)

  • CHARATAN, R. M., & WILLIAMS, R. S.

citation count

  • 0

complete list of authors

  • CHARATAN, RM||WILLIAMS, RS

publication date

  • July 1992