Calibration of an energy dispersive spectroscopy k factor using Rutherford backscattering Academic Article uri icon

published proceedings

  • Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

author list (cited authors)

  • Barbour, J. C., Sickafus, K., & Nastasi, M.

citation count

  • 11

complete list of authors

  • Barbour, JC||Sickafus, K||Nastasi, M

publication date

  • September 1985