Calibration of an energy dispersive spectroscopy k factor using Rutherford backscattering
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abstract
Energy dispersive spectroscopy (EDS) k factors for three systems (NiSi, NiAl, and AuFe) are determined on a JEOL 200cx electron microscope operated at 200 keV. Rutherford backscattering spectrometry (RBS) was used to give an accurate composition analysis for the EDS standards, and to measure thicknesses used in absorption corrections. The k factors (for compositions in weight percent) were found to be kNiSi=1.280.045, kNiAl=0.9490.033, and kAuFe=3.880.272. Uncertainties for the k factors determined in this way are 3.5% except for samples having only trace quantities in which the accuracy is only 7%8%. The uncertainty in the k factors is discussed in terms of the accuracy of the technique to calibrate the standards (RBS), the inherent uncertainty in x-ray detection, and the accuracy of the absorption correction. A sample configuration is described to check the necessity for and the accuracy of absorption corrections by analyzing EDS spectra from a bilayer sample of one x-ray absorbing film (Ni) on a nonabsorbing film (Si). These k factors are compared to results using conventional techniques and to theoretically calculated k factors.
