Comparison of atomic force microscopy imaging methods and roughness determinations for a highly polished quartz surface Academic Article uri icon

abstract

  • Using two different atomic force microscopes (tapping-mode AFM and non-contact-mode AFM) , the microstructure and the roughness of a polished quartz surface were studied. Sample surfaces were imaged in different environments, under ambient conditions, under high vacuum and ultrahigh vacuum. The surface morphology observed under different conditions in all cases revealed ridge and valley features, scratches, and holes.

published proceedings

  • JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

author list (cited authors)

  • Dokou, E., Zhang, L. P., & Barteau, M. A.

citation count

  • 7

complete list of authors

  • Dokou, E||Zhang, LP||Barteau, MA

publication date

  • January 2002