Formation of silicon nanocrystals in SiO2 by oxireduction reaction induced by impurity implantation and annealing Academic Article

authors

• Nastasi, Michael

published proceedings

• Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

author list (cited authors)

• Jacobsohn, L. G., Zanatta, A. R., & Nastasi, M.

citation count

• 4

complete list of authors

• Jacobsohn, LG||Zanatta, AR||Nastasi, M

publication date

• January 2004

publisher

• American Vacuum Society  Publisher

published in

• n2166-2746ISSN  Journal

Digital Object Identifier (DOI)

• 10.1116/1.1761410

start page

• 1669

end page

• 1671

volume

• 22

issue

• 4

URL

• http://dx.doi.org/10.1116/1.1761410