Formation of silicon nanocrystals in SiO[sub 2] by oxireduction reaction induced by impurity implantation and annealing Academic Article uri icon

published proceedings

  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

author list (cited authors)

  • Jacobsohn, L. G., Zanatta, A. R., & Nastasi, M.

citation count

  • 4

complete list of authors

  • Jacobsohn, LG||Zanatta, AR||Nastasi, M

publication date

  • January 2004