Formation of silicon nanocrystals in SiO2 by oxireduction reaction induced by impurity implantation and annealing
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Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
author list (cited authors)
Jacobsohn, L. G., Zanatta, A. R., & Nastasi, M.
complete list of authors
Jacobsohn, LG||Zanatta, AR||Nastasi, M