Mechanical properties, stress evolution and high-temperature thermal stability of nanolayered MoSiN/SiC thin films Academic Article uri icon

published proceedings

  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

author list (cited authors)

  • Torri, P., Hirvonen, J., Kung, H., Lu, Y., Nastasi, M., & Gibson, P. N.

citation count

  • 7

complete list of authors

  • Torri, P||Hirvonen, J-P||Kung, H||Lu, Y-C||Nastasi, M||Gibson, PN

publication date

  • January 1999