Work function extraction of metal gates with alternate channel materials Academic Article uri icon

published proceedings

  • Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

author list (cited authors)

  • Coan, M., Johnson, D., Hwan Woo, J., Biswas, N., Misra, V., Majhi, P., & Rusty Harris, H.

citation count

  • 2

complete list of authors

  • Coan, Mary||Johnson, Derek||Hwan Woo, Jung||Biswas, Nivedita||Misra, Veena||Majhi, Prashant||Rusty Harris, H

publication date

  • March 2012