Work function extraction of metal gates with alternate channel materials Academic Article

authors

• Harris, Rusty

published proceedings

• JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

author list (cited authors)

• Coan, M., Johnson, D., Woo, J. H., Biswas, N., Misra, V., Majhi, P., & Harris, H. R.

citation count

• 2

complete list of authors

• Coan, Mary||Johnson, Derek||Woo, Jung Hwan||Biswas, Nivedita||Misra, Veena||Majhi, Prashant||Harris, H Rusty

publication date

• January 2012

publisher

• American Vacuum Society  Publisher

published in

• Journal of Vacuum Science and Technology B  Journal

Digital Object Identifier (DOI)

• 10.1116/1.3679412

start page

• 022202

end page

• 022202

volume

• 30

issue

• 2

URL

• http://dx.doi.org/10.1116/1.3679412