Fluorine and boron co-doped diamond-like carbon films deposited by pulsed glow discharge plasma immersion ion processing Academic Article uri icon

published proceedings

  • Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

altmetric score

  • 3

author list (cited authors)

  • He, X., Hakovirta, M., Peters, A. M., Taylor, B., & Nastasi, M.

citation count

  • 15

complete list of authors

  • He, Xiao-Ming||Hakovirta, M||Peters, AM||Taylor, B||Nastasi, M

publication date

  • May 2002