Fluorine and boron co-doped diamond-like carbon films deposited by pulsed glow discharge plasma immersion ion processing Academic Article

authors

• Nastasi, Michael

published proceedings

• Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

altmetric score

• 3

author list (cited authors)

• He, X., Hakovirta, M., Peters, A. M., Taylor, B., & Nastasi, M.

citation count

• 15

complete list of authors

• He, Xiao-Ming||Hakovirta, M||Peters, AM||Taylor, B||Nastasi, M

publication date

• May 2002

publisher

• American Vacuum Society  Publisher

published in

• Journal of Vacuum Science and Technology Part A: International Journal Devoted to Vacuum, Surfaces, and Films  Journal

Digital Object Identifier (DOI)

• 10.1116/1.1460890

start page

• 638

end page

• 642

volume

• 20

issue

• 3