A BOLT-ON DEPOSITION SOURCE FOR ULTRAHIGH-VACUUM GROWTH OF INTERMETALLIC COMPOUND FILMS Academic Article uri icon

abstract

  • An 8-in. ConFlat flange assembly with both an electron beam evaporator and a Knudsen cell has been constructed to deposit intermetallic compounds containing transition and group-III metals with specific phase composition. Initial depositions of thin films using this design have shown excellent epitaxy with the desired compound stoichiometry.

published proceedings

  • JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS

author list (cited authors)

  • SHUH, D. K., KIM, Y. K., & WILLIAMS, R. S.

citation count

  • 0

publication date

  • July 1989