Structure, hardness, and tribological properties of reactive magnetron sputtered chromium nitride films Academic Article uri icon

published proceedings

  • Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

author list (cited authors)

  • He, X., Baker, N., Kehler, B. A., Walter, K. C., Nastasi, M., & Nakamura, Y.

citation count

  • 73

complete list of authors

  • He, Xiao-Ming||Baker, N||Kehler, BA||Walter, KC||Nastasi, M||Nakamura, Y

publication date

  • January 2000