Structure, hardness, and tribological properties of reactive magnetron sputtered chromium nitride films Academic Article

authors

• Nastasi, Michael

published proceedings

• Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

author list (cited authors)

• He, X., Baker, N., Kehler, B. A., Walter, K. C., Nastasi, M., & Nakamura, Y.

citation count

• 73

complete list of authors

• He, Xiao-Ming||Baker, N||Kehler, BA||Walter, KC||Nastasi, M||Nakamura, Y

publication date

• January 2000

publisher

• American Vacuum Society  Publisher

published in

• Journal of Vacuum Science and Technology Part A: International Journal Devoted to Vacuum, Surfaces, and Films  Journal

Digital Object Identifier (DOI)

• 10.1116/1.582154

start page

• 30

end page

• 36

volume

• 18

issue

• 1

URL

• http://dx.doi.org/10.1116/1.582154