Graphite macroparticle filtering efficiency of three different magnetic filter designs used in the filtered cathodic vacuum arc deposition of tetrahedral amorphous carbon films Academic Article uri icon

published proceedings

  • Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

author list (cited authors)

  • Hakovirta, M., Walter, K. C., Wood, B. P., & Nastasi, M.

citation count

  • 5

complete list of authors

  • Hakovirta, M||Walter, KC||Wood, BP||Nastasi, M

publication date

  • September 1999