Sub-15 nm nanoimprint molds and pattern transfer Academic Article uri icon

published proceedings

  • JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

author list (cited authors)

  • Morecroft, D., Yang, J., Schuster, S., Berggren, K. K., Xia, Q., Wu, W., & Williams, R. S.

complete list of authors

  • Morecroft, Debbie||Yang, Joel KW||Schuster, S||Berggren, Karl K||Xia, Qiangfei||Wu, Wei||Williams, R Stanley

publication date

  • January 1, 2009 11:11 AM