Sub-15 nm nanoimprint molds and pattern transfer Academic Article uri icon

published proceedings

  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

altmetric score

  • 3

author list (cited authors)

  • Morecroft, D., Yang, J., Schuster, S., Berggren, K. K., Xia, Q., Wu, W., & Williams, R. S.

citation count

  • 40

complete list of authors

  • Morecroft, Debbie||Yang, Joel KW||Schuster, S||Berggren, Karl K||Xia, Qiangfei||Wu, Wei||Williams, R Stanley

publication date

  • January 2009