Optical properties of diamond-like carbon synthesized by plasma immersion ion processing Academic Article uri icon

published proceedings

  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

altmetric score

  • 3

author list (cited authors)

  • He, X., Bardeau, J., Lee, D. H., Walter, K. C., Tuszewski, M., & Nastasi, M.

citation count

  • 14

complete list of authors

  • He, Xiao-Ming||Bardeau, J-F||Lee, DH||Walter, KC||Tuszewski, M||Nastasi, M

publication date

  • January 1999