Nonlithographic approach to nanostructure fabrication using a scanned electrospinning source Conference Paper

abstract

• The development of a method, which used a microfabricated tip as the electrospinning source to create polymer nanofibers, was analyzed. Electrospinning process was applied for depositing oriented poly(methyl methacrylate) fibers having diameters that ranged from 85 to 350 nm. The PMMA fibers were deposited on various substrates such as silicon, aluminum, silicon dioxide, and glass. The objective of the use of polymeric fibers as etch masks was to pattern nanostructures in the surface of a silicon wafer. The electrospinning process was successful in producing nanofibers, which differed in shape and dimensions, based on solution properties and deposition parameters.

authors

• Kameoka, Jun

published proceedings

• JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

altmetric score

• 3

author list (cited authors)

• Czaplewski, D., Kameoka, J., & Craighead, H. G.

citation count

• 24

complete list of authors

• Czaplewski, D||Kameoka, J||Craighead, HG

publication date

• November 2003

publisher

• American Vacuum Society  Publisher

published in

• Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics  Journal

keywords

• 40 Engineering
• 4016 Materials Engineering
• 4018 Nanotechnology

Digital Object Identifier (DOI)

• 10.1116/1.1627800

start page

• 2994

end page

• 2997

volume

• 21

issue

• 6

URL

• http%3A%2F%2Fdx.doi.org%2F10.1116%2F1.1627800