Nonlithographic approach to nanostructure fabrication using a scanned electrospinning source Conference Paper uri icon

abstract

  • The development of a method, which used a microfabricated tip as the electrospinning source to create polymer nanofibers, was analyzed. Electrospinning process was applied for depositing oriented poly(methyl methacrylate) fibers having diameters that ranged from 85 to 350 nm. The PMMA fibers were deposited on various substrates such as silicon, aluminum, silicon dioxide, and glass. The objective of the use of polymeric fibers as etch masks was to pattern nanostructures in the surface of a silicon wafer. The electrospinning process was successful in producing nanofibers, which differed in shape and dimensions, based on solution properties and deposition parameters.

published proceedings

  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

author list (cited authors)

  • Czaplewski, D., Kameoka, J., & Craighead, H. G.

complete list of authors

  • Czaplewski, David||Kameoka, Jun||Craighead, HG

publication date

  • January 1, 2003 11:11 AM