Optimization of electrical characteristics of gadolinium (Gd2O3) incorporated HfO2 GaAs n-type metal-oxide semiconductor capacitors with silicon-interface-passivation layer Academic Article uri icon

published proceedings

  • Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

author list (cited authors)

  • Park, S. I., Ok, I., Kim, H., Zhu, F., Zhang, M., Yum, J. H., Han, Z., & Lee, J. C.

citation count

  • 4

complete list of authors

  • Park, Sung Il||Ok, Injo||Kim, Hyoung-Sub||Zhu, Feng||Zhang, Manhong||Yum, Jung Hwan||Han, Zhao||Lee, Jack C

publication date

  • January 2008