Synthesis of fluorinated diamond-like carbon films by the plasma immersion ion processing technique Academic Article

authors

• Nastasi, Michael

published proceedings

• Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

author list (cited authors)

• Hakovirta, M., Lee, D. H., He, X. M., & Nastasi, M.

citation count

• 17

complete list of authors

• Hakovirta, M||Lee, DH||He, XM||Nastasi, M

publication date

• May 2001

publisher

• American Vacuum Society  Publisher

published in

• Journal of Vacuum Science and Technology Part A: International Journal Devoted to Vacuum, Surfaces, and Films  Journal

Digital Object Identifier (DOI)

• 10.1116/1.1368197

start page

• 782

end page

• 784

volume

• 19

issue

• 3

URL

• http://dx.doi.org/10.1116/1.1368197