Synthesis of fluorinated diamond-like carbon films by the plasma immersion ion processing technique Academic Article

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authors

Nastasi, Michael

published proceedings

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

author list (cited authors)

Hakovirta, M., Lee, D. H., He, X. M., & Nastasi, M.

citation count

17

complete list of authors

Hakovirta, M||Lee, DH||He, XM||Nastasi, M

publication date

May 2001

publisher

American Vacuum Society Publisher

published in

Journal of Vacuum Science and Technology Part A: International Journal Devoted to Vacuum, Surfaces, and Films Journal