Synthesis of fluorinated diamond-like carbon films by the plasma immersion ion processing technique Academic Article uri icon

published proceedings

  • Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

author list (cited authors)

  • Hakovirta, M., Lee, D. H., He, X. M., & Nastasi, M.

citation count

  • 17

complete list of authors

  • Hakovirta, M||Lee, DH||He, XM||Nastasi, M

publication date

  • May 2001