Processing of diamondlike carbon using plasma immersion ion deposition Academic Article

authors

• Nastasi, Michael

published proceedings

• Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

author list (cited authors)

• Lee, D. H., Walter, K. C., & Nastasi, M.

citation count

• 13

complete list of authors

• Lee, DH||Walter, KC||Nastasi, M

publication date

• January 1999

publisher

• American Vacuum Society  Publisher

published in

• n2166-2746ISSN  Journal

Digital Object Identifier (DOI)

• 10.1116/1.590645

start page

• 818

end page

• 821

volume

• 17

issue

• 2

URL

• http://dx.doi.org/10.1116/1.590645