Processing of diamondlike carbon using plasma immersion ion deposition Academic Article uri icon

published proceedings

  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

author list (cited authors)

  • Lee, D. H., Walter, K. C., & Nastasi, M.

citation count

  • 13

complete list of authors

  • Lee, DH||Walter, KC||Nastasi, M

publication date

  • January 1999