Temperature Influence on Nanocrystals Embedded High-k Nonvolatile C – V Characteristics Academic Article uri icon


  • The temperature influence on memory functions of the nanocrystalline ZnO embedded Zr-doped Hf O2high-k capacitor was investigated. Both the memory window and the trapped charge density increased with the increase of temperature. The temperature effect on hole trapping was observed at 125°C, but not at 25 or 75°C. The temperature effect on electron trapping was obvious above 25°C. The interface quality is greatly influenced by the temperature, which was detected on the leakage current density-gate voltage, capacitance-voltage (C-V), and conductance-gate voltage curves. The sample temperature affects the carrier generation and transport mechanisms, which are responsible for the memory function changes. © 2010 The Electrochemical Society.

author list (cited authors)

  • Yang, C., Kuo, Y., Lin, C., & Kuo, W.

citation count

  • 9

publication date

  • January 2011