Effect of Oxygen Flow Rate on Electrical and Optical Properties of ATO Thin Films Prepared by RF Magnetron Sputtering Academic Article uri icon

author list (cited authors)

  • Yang, P., Jiang, L. R., Wu, J. Y., Chen, F., Galaviz-Prez, J. A., Shen, Q., Schoenung, J. M., & Zhang, L. M.

complete list of authors

  • Yang, P||Jiang, LR||Wu, Jun Yan||Chen, Fei||Galaviz-Pérez, Jorge Alberto||Shen, Qiang||Schoenung, Julie M||Zhang, Lian Meng

publication date

  • August 2014