Organic airborne molecular contamination in semiconductor fabrication clean rooms - A review Academic Article

authors

• Den, Walter

published proceedings

• JOURNAL OF THE ELECTROCHEMICAL SOCIETY

altmetric score

• 7

author list (cited authors)

• Den, W., Bai, H. L., & Kang, Y. H.

citation count

• 53

complete list of authors

• Den, W||Bai, HL||Kang, YH

publication date

• 2006

publisher

• The Electrochemical Society  Publisher

published in

• Journal of the Electrochemical Society  Journal

keywords

• 40 Engineering
• 4018 Nanotechnology

Digital Object Identifier (DOI)

• 10.1149/1.2147286

start page

• G149

end page

• G159

volume

• 153

issue

• 2

URL

• http://dx.doi.org/10.1149/1.2147286