Electrical and Optical Characteristics of WOx, ZrHfO, and Tri-Layer WOx Embedded ZrHfO High-k Based SSI-LEDs

abstract

• Three kinds of solid-state incandescent light emitting devices were fabricated from MOS capacitors with gate dielectrics compared of WOx, ZrHfO, and tri-layer WOx embedded ZrHfO, separately. Their electrical and optical characteristics were investigated. The ZrHfO SSI-LED has uniform light emission pattern due to the superb dielectric properties. The WOx SSI-LED showed the highest intensity of emitted light but a large leakage current. The tri-layer WOx embedded ZrHfO SSI-LED has the higher emitted light intensity than the ZrHfO SSI-LED has and a lower leakage current than the WOx SSI-LED has. Therefore, the tri-layer WOx embedded ZrHfO SSI-LED is the preferred device judged from the light emission efficiency and reliability.

authors

• Kuo, Yue

published proceedings

• ECS Transactions

author list (cited authors)

• Lin, W., & Kuo, Y.

citation count

• 1

publication date

• May 2021

publisher

• The Electrochemical Society  Publisher

keywords

• 40 Engineering
• 4018 Nanotechnology

Digital Object Identifier (DOI)

• 10.1149/10203.0063ecst

start page

• 63

end page

• 69

volume

• 102

issue

• 3

URL

• http://dx.doi.org/10.1149/10203.0063ecst