Maglev 6-DOF Stage for Nanopositioning
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abstract
This paper presents a novel magnetically levitated (maglev) stage with nanoscale positioning capability in all six degrees of freedom (DOFs). The key aspect of this device is that its single moving part has no mechanical contact with its stationary base, which leads to no mechanical friction and stiction, and no wear particle generation. We present herein the mechanical design, instrumentation, and test results of this maglev stage. Currently it shows position resolution of 4 nm, position noise of 2 nm rms, hundreds-of-micrometer translational travel range, a-few-milliradian rotational travel range, and power consumption less than a fraction of a Watt per axis. This maglev stage can be used in numerous applications such as manufacture of nanoscale structures, assembly and packaging on micro-size parts, vibration isolation for delicate instrumentation, and telepresence microsurgery.
