Maglev Linear Actuator for Nanopositioning Conference Paper uri icon


  • Manufacture of nanoscale structures and atomic-level manipulation is an emerging technology field in the 21st century [1,2]. This paper presents a novel magnetically levitated instrument capable of six-degrees-of-freedom (6-DOF) motion with a single moving part. The applications, where this generic positioning device can be used, are manufacturing of nanoscale structures, assembly and packaging of microparts, vibration isolation for delicate instrumentation and motion/force feedback in telepresence surgery. The key element of this stage is a linear actuator capable of providing forces in both suspension and translation without contact. The total range of motion for the linear actuator is 250 m. In this paper, we present the closed-loop control test results and stochastic noise/disturbance analysis and prediction for the linear actuator.

name of conference

  • ASME 2002 International Mechanical Engineering Congress and Exposition

published proceedings

  • Microelectromechanical Systems

author list (cited authors)

  • Kim, W., Maheshwari, H., & Gu, J.

citation count

  • 1

complete list of authors

  • Kim, Won-jong||Maheshwari, Himanshu||Gu, Jie

publication date

  • January 2002