High-precision control of a maglev linear actuator with nanopositioning capability
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This paper presents high-precision control of a magnetically levitated (maglev) linear actuator with novel geometric configuration. The linear actuator will be used as a unit actuator in the development of a maglev instrument with six-axis nanopositioning capability. The novel configuration in this design concept leads to a lightweight and compact size. The objective of development of this maglev linear actuator is to verify the underlying theory and fundamental working principles. The device will allow a linear motion range of ±500 μm with nanoscale positioning resolution. We present electromechanical design, controller design and implementation, and preliminary closed-loop experimental results with various step sizes for this linear actuator in this paper.
author list (cited authors)
Kim, W. J., & Maheshwari, H.