High-precision control of a maglev linear actuator with nanopositioning capability Conference Paper

abstract

• This paper presents high-precision control of a magnetically levitated (maglev) linear actuator with novel geometric configuration. The linear actuator will be used as a unit actuator in the development of a maglev instrument with six-axis nanopositioning capability. The novel configuration in this design concept leads to a lightweight and compact size. The objective of development of this maglev linear actuator is to verify the underlying theory and fundamental working principles. The device will allow a linear motion range of 500 m with nanoscale positioning resolution. We present electromechanical design, controller design and implementation, and preliminary closed-loop experimental results with various step sizes for this linear actuator in this paper.

authors

• Kim, Won-Jong

published proceedings

• Proceedings of the American Control Conference

author list (cited authors)

• Kim, W. J., & Maheshwari, H.

complete list of authors

• Kim, WJ||Maheshwari, H

publication date

• January 2002

published in

• Proceedings of the ... American Control Conference. American Control Conference  Journal

start page

• 4279

end page

• 4284

volume

• 5