Two-level differential burn-in policy for spatially heterogeneous defect units in semiconductor manufacturing

authors

• Kuo, Yue

published proceedings

• COMPUTERS & INDUSTRIAL ENGINEERING

author list (cited authors)

• Chen, Y., Yuan, T., Bae, S. J., & Kuo, Y.

citation count

• 0

complete list of authors

• Chen, Yuan||Yuan, Tao||Bae, Suk Joo||Kuo, Yue

publication date

• December 2021

publisher

• Elsevier  Publisher

published in

• Computers and Industrial Engineering  Journal

keywords

• Burn-in
• Cost Optimization
• Nonhomogeneous Poisson Process
• Reliability Defects
• Spatial Modeling
• Yield

Digital Object Identifier (DOI)

• 10.1016/j.cie.2021.107768

start page

• 107768

end page

• 107768

volume

• 162

URL

• http://dx.doi.org/10.1016/j.cie.2021.107768