Cluster ion Implantation: A New Approach to Ultra-Shallow Junction in Silicon Academic Article

authors

• Shao, Lin

published proceedings

• Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics

author list (cited authors)

• Lu, X., Shao, L., Wang, X., Liu, J., & Chu, W.

complete list of authors

• Lu, X||Shao, Lin||Wang, X||Liu, J||Chu, W

publication date

• January 2002

publisher

• American Institute of Physics  Publisher

published in

• Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics  Journal

volume

• 20

issue

• 992