Auger Electron Spectroscopy Study of GaAs Substrate Cleaning Procedures
Academic Article
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Overview
published proceedings
- Journal of The Electrochemical Society
altmetric score
- 3
author list (cited authors)
- Zilko, J. L., & Williams, R. S.
citation count
- 15
complete list of authors
- Zilko, JL||Williams, RS
publication date
- February 1982
publisher
- The Electrochemical Society Publisher