THE CDB HCDB SEMICONDUCTOR WAFER REPRESENTATION SERVER
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This paper describes the chip database (CDB) and the hierarchical chip database (HCDB), and their uses in a wafer representation server. The server provides data types and methods for hierarchically representing the three-dimensional geometry and fields of a semiconductor wafer during process, device, and yield simulation. The basic database data types and the general attribute mechanism have been used to create database extensions. These extensions implement operations frequently used by process and device simulation models. Examples of such extensions include different surface representations (e.g., piecewise linear) for use in describing geometry, meshes (e.g., finite difference mesh) for representing fields, and routines for encapsulating process and device simulation steps as sequences of abstract simulation steps. The combination of the databases and extensions forms a CDB/HCDB server that greatly reduces the effort required to create new statistical process, device, and yield simulation models. Examples of using the server to implement new models are described. Performance data demonstrate that the server is fast enough for use by analytical models during statistical simulation of macro cells, and is able to meet the representation needs of numerical simulation. The Technology CAD Framework Group (TFG) of the CAD Framework Initiative (CFI) has proposed a semiconductor wafer representation (SWR) server architecture and interface standard with many of the same goals as CDB/HCDB. A comparison between CDB/HCDB and SWR is provided. 1993 IEEE
