(Invited) Multifunctional Amorphous Metal Oxide Thin Films Structure Transformation for Various Functions
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The Electrochemical Society. Homogeneous amorphous metal oxide thin films can be transformed into heterogeneous structures for novel electronic, optoelectronic, thermal, and other applications. In all applications, the high quality dielectric properties of the original amorphous film remain unchanged, which is critical to device functions. Detailed discussions are carried out on processes of structure changes, mechanisms of device operations, and reliability issues. Examples of applications of the new heterogeneous metal oxide thin films on memories, diodes, antifuses, SSI-LEDs, micro displays, and on-chip optical interconnection systems are shown and discussed.
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