Multifunctional Amorphous Metal Oxide Thin Films - Structure Transformation for Various Functions Conference Paper

abstract

• The Electrochemical Society. Homogeneous amorphous metal oxide thin films can be transformed into heterogeneous structures for novel electronic, optoelectronic, thermal, and other applications. In all applications, the high quality dielectric properties of the original amorphous film remain unchanged, which is critical to device functions. Detailed discussions are carried out on processes of structure changes, mechanisms of device operations, and reliability issues. Examples of applications of the new heterogeneous metal oxide thin films on memories, diodes, antifuses, SSI-LEDs, micro displays, and on-chip optical interconnection systems are shown and discussed.

authors

• Kuo, Yue

published proceedings

• 2017 INTERNATIONAL CONFERENCE ON SEMICONDUCTOR TECHNOLOGY FOR ULTRA LARGE SCALE INTEGRATED CIRCUITS AND THIN FILM TRANSISTORS (ULSIC VS. TFT 6)

author list (cited authors)

• Kuo, Y.

citation count

• 0

complete list of authors

• Kuo, Y

publication date

• May 2017

publisher

• The Electrochemical Society  Publisher

published in

• ECS Transactions  Journal

Digital Object Identifier (DOI)

• 10.1149/07901.0021ecst

International Standard Book Number (ISBN) 13

• 9781607685395

start page

• 21

end page

• 29

volume

• 79

issue

• 1

URL

• http://dx.doi.org/10.1149/07901.0021ecst