Bayesian Approach to Reliability Projection for High k Dielectric Thin Films Conference Paper uri icon


  • A Bayesian statistical approach, which is suitable for reliability estimation and projection of high k dielectric thin films and nano devices, was developed. The essential characteristics of a Bayesian approach is the explicit use of probability for quantifying uncertainty in statistical inference. The model proposed for the reliability projection of high k thin films integrates a lifetime distribution and an empirical acceleration function into a Bayesian hierarchical framework. The advantages of applying the Bayesian approach are two-fold. It can properly combine the prior knowledge of SiO2with the new data collected on high k and it uses probability density to model the uncertainty associated with the practical application.

author list (cited authors)

  • Luo, W., Kuo, W., & Kuo, Y.

citation count

  • 1

publication date

  • January 2004