Bayesian approach to reliability projection for high k dielectric thin films Conference Paper uri icon

abstract

  • A Bayesian statistical approach, which is suitable for reliability estimation and projection of high k dielectric thin films and nano devices, was developed. The essential characteristics of a Bayesian approach is the explicit use of probability for quantifying uncertainty in statistical inference. The model proposed for the reliability projection of high k thin films integrates a lifetime distribution and an empirical acceleration function into a Bayesian hierarchical framework. The advantages of applying the Bayesian approach are two-fold. It can properly combine the prior knowledge of SiO2with the new data collected on high k and it uses probability density to model the uncertainty associated with the practical application.

name of conference

  • IEEE International Integrated Reliability Workshop Final Report, 2004

published proceedings

  • IEEE International Integrated Reliability Workshop Final Report, 2004

author list (cited authors)

  • Wen Luo, .., Way Kuo, .., & Yue Kuo.

citation count

  • 1

publication date

  • January 2004

publisher