Bayesian approach to reliability projection for high k dielectric thin films Conference Paper uri icon

abstract

  • A Bayesian statistical approach, which is suitable for reliability estimation and projection of high k dielectric thin films and nano devices, was developed. The essential characteristics of a Bayesian approach is the explicit use of probability for quantifying uncertainty in statistical inference. The model proposed for the reliability projection of high k thin films integrates a lifetime distribution and an empirical acceleration function into a Bayesian hierarchical framework. The advantages of applying the Bayesian approach are two-fold. It can properly combine the prior knowledge of SiO2with the new data collected on high k and it uses probability density to model the uncertainty associated with the practical application.

name of conference

  • IEEE International Integrated Reliability Workshop Final Report, 2004

published proceedings

  • 2004 IEEE INTERNATIONAL INTEGRATED RELIABILITY WORKSHOP FINAL REPORT

author list (cited authors)

  • Luo, W., Kuo, W., & Kuo, Y.

citation count

  • 1

complete list of authors

  • Luo, W||Kuo, W||Kuo, Y

publication date

  • January 2004