ULSIC vs. TFT - What Can They Learn from Each Other? Conference Paper uri icon

abstract

  • MOSFETs and TFTs have the similar technology growth path but different product application areas. Although the TFT manufacturing process was derived from the ULSIC process, its unique low-temperature, large-area technology development experience could greatly benefit the future large-wafer ULSIC production. The author discussed issues on processes, materials, devices, and applications with examples. In the future, although ULSIC and TFT will grow in different directions, they can be complimentary to each other or even be integrated into the same product in some cases. ┬ęThe Electrochemical Society.

author list (cited authors)

  • Kuo, Y.

citation count

  • 0

publication date

  • December 2019